Method for depositing a polymer layer on a surface of a support comprising at least a recessed zone
AssigneeCommissariat a l'Energie Atomique
InventorsChristiane Puget, David Henry
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AssigneeCommissariat a l'Energie Atomique
InventorsChristiane Puget, David Henry
Estimating the term…
A polymer layer is deposited on a surface of a support, said surface comprising a flat main part and at least one recessed zone with respect to the flat main part. The polymer layer is achieved by at least the following successive steps: deposition of a predetermined quantity of a liquid mixture comprising at least a polymer or at least a precursor of said polymer on the flat main part of the surface of the support, introducing at least a part of the liquid mixture into the recessed zone by moving a cylinder placed on the flat main part of the surface, deposition of an additional quantity of liquid mixture on the flat main part of the surface, and rotation of the support along an axis perpendicular to the plane of the surface.
A method for depositing a polymer layer on a surface of a support, said surface comprising a flat main part and at least one recessed zone with respect to the flat main part, comprising at least the following successive steps:
Dependencies are inferred from the claim text.