Position correcting apparatus, vacuum processing equipment and position correcting method
AssigneeUlvac, Inc.
InventorYoshinori Fujii
Life of this patent
Estimating the term…
Abstract
A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle α to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance.
Claims17
A position-correcting apparatus, comprising:
- a holding stand for rotating object to be transported around a rotation-axis line as a center within a plane perpendicular to the rotation-axis line;
- a stand-elevating mechanism for moving the holding stand upward and downward;
- a temporary placing portion for temporary placing the object to be transported;
- and
- an oblique correcting and moving device inclined at a predetermined intersecting angle to the rotation-axis line for moving obliquely upward and downward the temporary placing portion.
A position-correcting apparatus, comprising:
- a holding stand for rotating the object to be transported around a rotation-axis line as a center within a plane perpendicular to the rotation-axis line;
- a substrate-elevating mechanism for moving upward and downward the object to be transported at a position above the holding stand;
- a temporary placing portion for temporary placing the object to be transported;
- and
- an oblique correcting and moving device for moving the temporary placing portion obliquely upward and downward inclined at a predetermined intersecting angle to the rotation-axis line.
A position-correcting apparatus, comprising:
- a holding stand for rotating the object to be transported around a rotation axis line as a center within a plane perpendicular to the rotation-axis line;
- and
- an in-plane correcting and moving device for moving within the plane the object to be transported arranged on the holding stand.
A position-correcting method, comprising the steps of:
- detecting an error distance within a plane between a center of object to be transported arranged on a holding stand and a rotation-axis line, and an error angle formed by a straight line connecting between the center of the object to be transported and the rotation-axis line within the plane, and a moving direction of the object to be transported within the plane moved by an oblique correcting and moving device, by using the holding stand for rotating the object to be transported around the rotation-axis line within the plane perpendicular to the rotation-axis line, and the oblique correcting and moving device for moving obliquely the object to be transported with respect to the plane;
- making the straight line connecting between the center of the object to be transported and the rotation-axis line within the plane to be parallel to the moving direction of the object to be transported within the plane by the oblique correcting and moving device by rotating the holding stand for the error angle while the object to be transported rest on the holding stand;
- and
- positioning the central position of the object to be transported on the rotation-axis line by moving the object to be transported by the oblique correcting and moving device so as to be equal to a moved distance within the plane to the error distance.
A position-correcting method, comprising the steps of:
- detecting an error distance within a plane between a center of object to be transported arranged on a holding stand and a rotation-axis line, and an error angle formed by a straight line connecting between the center of the object to be transported and the rotation-axis line within the plane, and a moving direction of the object to be transported within the plane moved by an in-plane correcting and moving device, by using the holding stand for rotating the object to be transported around the rotation-axis line as a center within the plane perpendicular to the rotation-axis line, and the in-plane correcting and moving device for moving the object to be transported within the plane;
- making the straight line connecting between the center of the object to be transported and the rotation-axis line within the plane to be in parallel to the moving direction of the object to be transported in the plane while the object to be transported is arranged on the holding stand and rotating the holding stand by the error angle;
- and
- positioning the center of the object to be transported on the rotation-axis line by moving the object to be transported so as to be zero of the error distance by the in-plane correcting and moving device.
Dependencies are inferred from the claim text.