Movable radiant heat sources
AssigneeASM America, Inc.
InventorsRavinder Aggarwal, Jeroen Stoutjesdijk
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Abstract
A semiconductor processing apparatus including a processing chamber and a plurality of radiant heat sources. The radiant heat sources heat a workpiece within the chamber. At least one of the radiant heat sources is movable during processing in an oscillatory motion along a path less than about 10 mm from a geometric center of the oscillatory motion.
Claims65
A semiconductor processing apparatus comprising:
- a processing chamber;
- and
- a plurality of radiant heat sources to heat a workpiece within the chamber, wherein at least one of the radiant heat sources is movable during processing in an oscillatory motion along a path less than about 10 mm from a geometric center of the oscillatory motion.
A semiconductor processing apparatus comprising:
- a processing chamber;
- and
- a plurality of radiant heat sources to illuminate a first area on a workpiece within the chamber, wherein at least one of the radiant heat sources is movable in a motion during processing from a first angular position to a second angular position to illuminate a second area on the workpiece, a ratio of the second area to the first area less than about 10%.
A method of processing a semiconductor workpiece, the method comprising:
- providing a processing chamber;
- loading the workpiece into the chamber;
- heating the workpiece with a plurality of radiant heat sources;
- and
- moving at least one of the radiant heat sources in an oscillatory motion along a path, the motion less is than about 10 mm from a geometric center of the oscillatory motion.
A method of processing a workpiece in a semiconductor processing apparatus, the method comprising:
- providing a processing chamber;
- loading the workpiece into the chamber;
- heating the workpiece with a plurality of radiant heat sources, each of the radiant heat sources illuminating a first area on the workpiece;
- and
- moving at least one of the radiant heat sources in an oscillatory motion along a path, the radiant heat sources illuminating a second area on the workpiece, a ratio of the second area to the first area being less than about 10%.
Dependencies are inferred from the claim text.