Method for improving heat transfer of a focus ring to a target substrate mounting device
AssigneeTokyo Electron Limited
InventorsMasaaki MIYAGAWA, Akihiro Yoshimura
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Abstract
A focus ring heat transfer method improves heat transfer of a focus ring arranged in an outer peripheral portion of a mounting surface of a mounting table adapted to mount a target substrate in a chamber. The method includes steps of: disposing a heat transfer sheet between the focus ring and the mounting table; and vacuum-evacuating the chamber prior to processing the target substrate and then restoring the pressure the inside of the chamber to an atmospheric pressure or a light vacuum pressure. Therefore, air present in a fine gap between the heat transfer sheet and the mounting surface is removed to allow the heat transfer sheet to adhere to the mounting surface.
Claims6
A method for improving heat transfer of a focus ring arranged in an outer peripheral portion of a mounting surface of a mounting table, the mounting table adapted to mount a target substrate in a chamber, the method comprising:
- disposing a heat transfer sheet between the focus ring and the mounting table;
- and
- vacuum-evacuating the chamber prior to processing the target substrate and then restoring the pressure inside the chamber to an atmospheric pressure or a slight vacuum pressure, whereby air present in a fine gap between the heat transfer sheet and the mounting surface is removed to allow the heat transfer sheet to adhere to the mounting surface.
Dependencies are inferred from the claim text.