Sapphire substrates and methods of making same
AssigneeSaint-Gobain Ceramics & Plastics, Inc.
InventorsBrahmanandam V. Tanikella, Matthew A. Simpson, Palaniappan Chinnakaruppan, Robert A. Rizzuto, Isaac K. Cherian, Ramanujam Vedantham
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Abstract
A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm2, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.
Claims45
A sapphire substrate, comprising:
- a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientation, and having a nTTV of not greater than about 0.037 μm/cm2, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.
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A sapphire substrate, comprising:
- a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientation, and having a TTV of not greater than about 3.00 μm, wherein TTV is total thickness variation of the generally planar surface, and the substrate has a diameter not less than about 6.5 cm and a thickness not greater than about 525 μm.
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41-43. (canceled)
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A sapphire substrate, comprising:
- a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane, and having a nTTV of not greater than about 0.025 μm/cm2, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface.
Dependencies are inferred from the claim text.