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US 2008/0157237 A1Published application
Switching device and method of fabricating the same
OwnerMyung-Soo Kiminventor
Life of this patent
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Abstract
A switching device having a construction that facilitates physical contact between the second terminal electrode and the first terminal electrode, thereby enabling the performance of turn-on. Embodiments do not require an impurity diffusion region nor performs switching action through the channel region so that can become highly integrated and thinness. Also, switching can be performed by way of the physical contact of the first terminal electrode and the second terminal electrode, thereby making it possible to improve turn on-off characteristics.
Claims20
An apparatus comprising:
- a switching electrode formed over a semiconductor substrate;
- a first terminal electrode formed over the semiconductor substrate spaced apart from the switching electrode;
- and
- a second terminal electrode extending laterally over the semiconductor substrate including the switching electrode and the first terminal electrode, wherein the second terminal has a first end that is fixedly supported and a second end that is not fixedly supported.
1 more element
An apparatus comprising:
- a first metal layer formed over a semiconductor substrate;
- a second metal layer formed spaced apart laterally from the first metal layer over the semiconductor substrate;
- an elastic layer formed spaced apart vertically from and extending over the first metal layer and the second metal layer, the elastic layer including a first end fixedly supported and a second end not fixedly supported.
A method comprising:
- forming a first metal layer over a semiconductor substrate;
- forming a second metal layer formed spaced apart laterally from the first metal layer over the semiconductor substrate;
- forming an elastic layer spaced apart vertically from and extending over the first metal layer and the second metal layer,
- wherein the elastic layer includes a first end fixedly positioned and a second end not fixedly positioned.
1 more element
Dependencies are inferred from the claim text.