Metrology Structure And Methods
AssigneeHewlett-Packard Development Company, L.P.
InventorsStephen Jalrus Potochnik, Kenneth James Faase
Life of this patent
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Abstract
A method of indicating the progress of a sacrificial material removal process, the method, comprising; freeing a portion of a member, the member being disposed in a cage and laterally surrounded by the sacrificial material; and preventing the freed portion of the member from floating away by retaining the freed member.
Claims10
A method of indicating the progress of a sacrificial material removal process, the method, comprising;
- freeing a portion of a member, the member being disposed in a cage and laterally surrounded by the sacrificial material;
- and
- preventing the freed portion of the member from floating away by retaining the freed member.
A method of indicating the progress of a sacrificial material removal process, the method, comprising;
- freeing a portion of a member, the member being disposed in cage and laterally surrounded by the sacrificial material;
- and
- detecting the freed portion of the member by detecting a change in an angle of light reflected from a surface of the freed portion of the member.
A method of indicating the progress of a sacrificial material removal process, the method comprising;
- providing a plurality of cages and members of different sizes in area on a substrate;
- and
- freeing a smallest member from the plurality of members first and successively freeing larger members as a removal process progresses in time.
An apparatus for evaluating progress of a sacrificial material removal process, the apparatus, comprising;
- first means for laterally retaining a member, the first means being disposed on a substrate;
- a first member disposed within the means for laterally retaining;
- and
- sacrificial material disposed laterally around the first member and within the first means for laterally retaining.
Dependencies are inferred from the claim text.