Debris mitigation system and lithographic apparatus
AssigneesASML Netherlands B.V., Koninklijke Philips Electronics N.V.
InventorsMaarten Marinus Johannes Wilhelmus Van Herpen, Derk Jan Wilfred Klunder, Wouter Anthon Soer, Kurt Gielissen
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Abstract
A debris mitigation system for trapping contaminant material coming from a debris-generating radiation source. The system includes a contamination barrier constructed and arranged to rotate about an axis, and a magnet structure constructed and arranged to provide a magnetic field for deflecting charged debris from the radiation source. The magnet structure is constructed and arranged to provide a magnetic field through the contamination barrier. The magnetic field, when passing through the contamination barrier, is oriented along planes generally coinciding with the axis of rotation of the contamination barrier.
Claims25
A debris mitigation system for trapping contaminant material coming from a debris-generating radiation source comprising:
- a contamination barrier constructed and arranged to rotate about an axis;
- and
- a magnet structure constructed and arranged to provide a magnetic field for deflecting charged debris from the radiation source, said magnet structure being constructed and arranged to provide a magnetic field through said contamination barrier, said magnetic field, when passing through the contamination barrier, being oriented along planes generally coinciding with the axis of rotation of the contamination barrier.
A lithographic apparatus comprising:
- a patterning device constructed and arranged to pattern a beam of radiation;
- a projection system constructed and arranged to project the patterned beam of radiation onto a substrate;
- and
- a debris mitigation system constructed and arranged to trap contaminant material generated by a debris-generating radiation source, the debris mitigation system comprising
- a contamination barrier constructed and arranged to rotate about an axis;
- and
- a magnet structure constructed and arranged to provide a magnetic field for deflecting charged debris from the radiation source, said magnet structure being constructed and arranged to provide a magnetic field through said contamination barrier, said magnetic field, when passing through the contamination barrier, being oriented along planes generally coinciding with the axis of rotation of the contamination barrier.
Dependencies are inferred from the claim text.