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US 2008/0156689 A1Published application
Methods and apparatus for sensing substrates in carriers
OwnerSushant S. Koshti, Eric A. Englhardt +1inventors
InventorsSushant S. Koshti, Eric A. Englhardt, Vinay K. Shah
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Abstract
In some aspects, a method is provided for mapping contents of a substrate carrier. The method includes (1) moving a carrier to a sensor; and (2) determining, with the sensor, a presence or an absence of a substrate in the carrier based upon a position of a substrate clamp in the carrier. Numerous other aspects are provided.
Claims17
A method of mapping contents of a substrate carrier, comprising:
- moving a carrier to a sensor;
- and
- determining, with the sensor, a presence or an absence of a substrate in the carrier based upon a position of a substrate clamp in the carrier.
A substrate carrier, comprising:
- a slot adapted to support a substrate;
- and
- a substrate clamping structure adapted to hold the substrate within the slot and adapted to displace from a first position to a second position when the substrate is placed in the slot, wherein at least one of the first and second positions is detectable while the substrate carrier is closed.
An apparatus, comprising:
- a loadport;
- a substrate carrier, comprising:
- a slot adapted to support a substrate;
- and
- a substrate clamping structure adapted to hold the substrate within the slot and adapted to displace from a first position to a second position when the substrate is placed in the slot, wherein at least one of the first and second positions is detectable when the substrate carrier is coupled to the loadport and while the substrate carrier is closed.
2 more elements
An apparatus comprising:
- a substrate carrier having a body with one or more channels that do not increase a height of the carrier;
- a loadport having a door opening mechanism with one or more protrusions adapted to fit within the one or more channels of the substrate carrier;
- and
- an optical sensor coupled to one or more of the protrusions of the door opening mechanism, the optical sensor adapted to detect a presence or absence of a substrate in the substrate carrier when the substrate carrier is coupled to the loadport.
1 more element
Dependencies are inferred from the claim text.