System for processes including fluorination

A system adapted to receive and process a tape, comprising:

• a gas mixing chamber adapted to receive a plurality of gases;
• a processing chamber adapted to receive gas from the gas mixing chamber and adapted to receive a tape to be processed using the gas;
• a gate valve positioned between the gas mixing chamber and the processing chamber;
• an inlet chamber adapted to transmit an unprocessed tape into the processing chamber;
• an outlet chamber adapted to receive a processed tape from the processing chamber;
• a first conduit in communication with the inlet chamber and configured to form a first loop with the inlet chamber;
• a first fan positioned to recirculate a gas flow through the first loop including the first conduit and the inlet chamber;
• a second conduit in communication with the outlet chamber and configured to form a second loop with the outlet chamber;
• a second fan positioned to recirculate a gas flow through the second loop including the second conduit and the outlet chamber;
• a first evacuation line in communication with the first conduit;
• a first valve adapted to open and close the first conduit line;
• a second evacuation line in communication with the second conduit;
• a second valve adapted to open and close the second conduit line;
• a third evacuation line in communication with the processing chamber;
• a third valve adapted to open and close the third evacuation line;
• a fourth evacuation line in communication with the gas mixing chamber;
• a fourth valve adapted to open and close the fourth evacuation line;
• and
• an output evacuation line having a length, the output evacuation line in communication with the first evacuation line at a first position along the length, the second evacuation line at a second position along the length, the third evacuation line at a third position along the length, and the fourth evacuation line at a fourth position along the length.

A method for processing a tape including a plurality of indium preforms, comprising:

• providing a tape including a plurality of indium preforms positioned thereon, the indium preforms each including a body comprising indium, the body including an indium oxide surface layer;
• and
• delivering the tape to an inlet chamber;
• passing a recirculating gas flow on the tape in the inlet chamber;
• delivering the tape from the inlet chamber to a processing chamber, the processing chamber including fluorine atoms therein;
• reacting a plurality of the fluorine atoms in the processing chamber with the indium oxide surface layer on the preforms, to form indium oxy-fluoride on the preforms;
• delivering the tape to an outlet chamber, wherein the tape in the outlet chamber include indium preforms having both indium oxy-fluoride and indium oxide surface regions;
• and
• passing a recirculating gas flow on the tape in the outlet chamber.