US 2008/0156359 A1 · SYSTEMS AND METHODS FOR MODULAR AND CONFIGURABLE SUBSTRATE CLEANING

Abstract

Embodiments of the invention generally relate to a modular, configurable system in which distinct cleaning and drying modules can be arranged in different combinations selectable by a user of the system. In one embodiment a configurable system for substrate cleaning is provided. The configurable system provides a frame including first and second bays, the first and second bays each adapted to hold one or more cleaning or drying modules, and a transfer area positioned between the first and second bays including a robot adapted to move substrates to and from the one or more modules positioned within the first and second bays, wherein the frame is adapted to hold a user selectable set of one or more cleaning or drying modules in the first and second bays.

Claims20

Dependent claims

A configurable system for substrate cleaning comprising:

a frame including first and second bays, the first and second bays each adapted to hold one or more cleaning or drying modules;
and
a transfer area positioned between the first and second bays including a robot adapted to move substrates to and from the one or more modules positioned within the first and second bays;
wherein the frame is adapted to hold a user selectable set of one or more cleaning or drying modules in the first and second bays.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

11/963,458Filed 21 Dec 2007

Priority

27 Dec 2006

Published

3 Jul 2008

Term ends

Not estimatedThe source records don’t support an estimate.

Classification4 codes

H10P 72/0408
For cleaning followed by drying, rinsing, stripping, blasting or the like: for drying
H10P 72/0406
Apparatus for fluid treatment: for cleaning followed by drying, rinsing, stripping, blasting or the like
H10P 72/0468
Apparatus for manufacturing or treating in a plurality of work-stations: comprising a chamber adapted to a particular process
H10P
Generic processes or apparatus for the manufacture or treatment of devices covered

Systems and methods for modular and configurable substrate cleaning

Life of this patent

Systems and methods for modular and configurable substrate cleaning

Life of this patent

Abstract

Claims20