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AssigneeTohoku Seiki Industries, Ltd.
InventorsMasanobu Kusunoki, Keitaro Harada, Masayoshi Yokoo, Yoshinobu Takano
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This is a thin film forming apparatus which is equipped with a target constructed of a thin film material, a cathode for generating a particulate thin film material from the target, a supporting member for supporting the substrate on which the particulate thin film material is to be deposited, a heater for heating the substrate, and a guide for introducing the particulate thin film material onto a surface of the substrate where the thin film material is deposited, wherein the supporting member supports the substrate so as to expose the first principal surface and its backside (second principal surface) of the substrate, the target is disposed in a position for producing the particulate thin film material in an extension of the first principal surface of the substrate, and the guide is disposed on the first principal surface and the second principal surface of the substrate.
A thin film forming method which generates a particulate thin film material, introduces and deposits the particulate thin film material, which is generated, on a principal surface of a substrate, and forms a thin film, characterized by supporting the substrate so that a first principal surface and its backside (hereafter, this is called a second principal surface) may be exposed, generating the particulate thin film material on an extension of an in-plane direction of the first principal surface of the substrate, and introducing the particulate thin film material, which is generated, on the first principal surface and the second principal surface of the substrate.
A thin film forming apparatus which is equipped with a target constructed of a thin film material, a cathode for generating a particulate thin film material from the target, a supporting member for supporting the substrate on which the particulate thin film material is to be deposited, a heater for heating the substrate, and a guide for introducing the particulate thin film material onto a surface of the substrate where the thin film material is deposited, characterized in that the supporting member supports the substrate so as to expose the first principal surface and its backside (second principal surface) of the substrate, the target is disposed in a position for producing the particulate thin film material in an extension of an in-plane direction of the first principal surface of the substrate, and the guide is disposed on the first principal surface and the second principal surface of the substrate.
Dependencies are inferred from the claim text.