Manufacturing Method of Semiconductor Device and Laser Processing Apparatus

A method for manufacturing a semiconductor device comprising the steps of:

• forming a light absorption layer;
• forming an insulating layer over the light absorption layer;
• and
• irradiating the insulating layer and the light absorption layer with a multi-mode laser beam and a single-mode laser beam simultaneously so that those laser beams overlap with each other and forming an opening in a region of the insulating layer and the light absorption layer where those laser beams overlap.

A laser processing apparatus comprising:

• a first laser oscillation device which emits a first laser beam which is a multi-mode laser beam;
• a first optical system which shapes the first laser beam and irradiates the first laser beam to an irradiated object;
• a second laser oscillation device which emits a second laser beam which is a single-mode laser beam;
• a second optical system which shapes the second laser beam;
• an optical element which divides the second laser beam passed through the second optical system and which irradiates the second laser beam to the irradiated object so that the second laser beam overlaps with the first laser beam;
• and
• a stage which holds the irradiated object and moves to a desired place.

A laser processing apparatus comprising:

• a first laser oscillation device which emits a first laser beam which is a multi-mode laser beam;
• a first optical system which shapes the first laser beam and irradiates the first laser beam to an irradiated object;
• a second laser oscillation device which emits a second laser beam which is a single-mode;
• a second optical system which shapes and divides the second laser beam;
• a first deflector which controls a traveling direction of the second laser beam;
• a second deflector which irradiates the second laser beam to the irradiated object so that the second laser beam overlaps with the first laser beam;
• and
• a stage which holds the irradiated object and moves to a desired place.