Method of forming metal lines and bumps for semiconductor devices
AssigneeSamsung Electronics Co., Ltd.
InventorsSoon-bum Kim, Sung-min Sim, Dong-hyeon Jang, Jae-sik Chung, Se-yong Oh
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AssigneeSamsung Electronics Co., Ltd.
InventorsSoon-bum Kim, Sung-min Sim, Dong-hyeon Jang, Jae-sik Chung, Se-yong Oh
Estimating the term…
Provided is a method of forming conductors (e.g., metal lines and/or bumps) for semiconductor devices and conductors formed from the same. First and second seed metal layers may be formed. At least one mask may be formed on a portion on which a conductor is to be formed. An exposed portion may be oxidized. The oxidized portion may be removed. A conductive structure may be formed on an upper surface of a portion which is not oxidized. The conductors may be metal lines and/or bumps. The conductive structures may be solder balls.
A method of forming conductors, comprising:
A conductor comprising:
Dependencies are inferred from the claim text.