Method for manufacturing a thin film transistor array panel
AssigneeSamsung Electronics Co., Ltd.
InventorsMin-Ho YOON, Young-Min KIM, Jung-Han SHIN, Joon-Hak OH, Tae-Young CHOI, Seung-Hwan CHO
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Abstract
A method for manufacturing a thin film transistor (“TFT”) array panel includes forming a gate electrode, forming source and drain electrodes insulated from the gate electrode, forming an organic semiconductor contacting the source and drain electrodes, spraying a solvent on the organic semiconductor, drying the solvent at room temperature, and annealing the organic semiconductor.
Claims22
A method of manufacturing a thin film transistor array panel, the method comprising:
- forming a gate electrode;
- forming source and drain electrodes insulated from the gate electrode;
- forming an organic semiconductor contacting the source and drain electrodes;
- spraying a solvent on the organic semiconductor;
- drying the solvent;
- and
- annealing the organic semiconductor.
A method of manufacturing a thin film transistor array panel, the method comprising:
- forming a gate electrode;
- forming source and drain electrodes insulated from the gate electrode;
- and
- forming an organic semiconductor contacting the source and drain electrodes,
- wherein forming the organic semiconductor includes
- spraying an organic semiconductor solution,
- first-drying the organic semiconductor solution,
- re-melting the organic semiconductor solution to form re-melted organic semiconductor solution, and
- second-drying the re-melted organic semiconductor solution.
A method of a thin film transistor having an organic semiconductor, the method comprising:
- forming a gate electrode;
- forming source and drain electrodes insulated from the gate electrode;
- providing an organic semiconductor solution including an organic material and a first solvent for the thin film transistor and contacting the source and drain electrodes;
- first-drying the organic semiconductor solution to form an organic semiconductor having a first arrangement of organic semiconductor molecules;
- melting and second-drying the organic semiconductor to form an organic semiconductor having a second arrangement of organic semiconductor molecules.
Dependencies are inferred from the claim text.