Method of manufacturing a liquid ejection head and liquid ejection head

A method of manufacturing a liquid ejection head, wherein the liquid ejection head has liquid ejection openings, liquid paths communicating to the ejection openings and energy-generating elements that generate energy for discharging ink, said method comprising:

• a steps of forming porous silicon areas in portions where the liquid paths are to be formed, at one surface to an inside of the silicon substrate;
• a steps of forming a protective layer for protecting the heating portion in the porous silicon areas;
• a steps of forming a layer member including the heating portion and an electrode layer for supplying electricity to the heating portions to heat them, on the protective layer;
• a steps of forming the ink ejection openings at an opposite surface of the silicon substrate which is opposite to said one surface so that the ink ejection openings communicate with the porous silicon areas;
• and
• a steps of forming the liquid paths by removing the porous silicon areas.