High Purity Zrb2 Powder and Manufacturing Method Thereof

Abstract

A high purity ZrB2 powder having a purity of 99.9 wt % or higher excluding C and gas components, and a manufacturing method of such high purity ZrB2 powder, including the steps of: subjecting a Zr sponge raw material to electron beam melting and casting to prepare an ingot having a purity of 99.9 wt % or higher; cutting the ingot into a cut powder and hydrogenating the cut powder into ZrH2; pulverizing and dehydrogenating the resultant product into a Zr powder and oxidizing the Zr powder at a high temperature in an oxygen atmosphere into a ZrO2 fine powder; and mixing the ZrO2 fine powder with B having a purity of 99.9 wt % or higher so as to reduce ZrO2 and obtain a ZrB2 powder having a purity of 99.9 wt % or higher. Purity of the ZrB2 powder for use in sintering is made to be 99.9 wt % or higher, which is required in the manufacture of a ZrB2 single crystal substrate with the high frequency induction heating FZ method (Floating Zone Method), and it is thereby possible to obtain a high purity ZrB2 powder and the manufacturing method thereof enabling the enlargement of a ZrB2 single crystal substrate and reduction in the manufacturing costs associated therewith.

Dependencies are inferred from the claim text.