Mircromirror device having a vertical hinge
AssigneesSilicon Quest Kabushiki-Kaisha, Olympus Corporation
InventorsFusao Ishii, Yoshihiro Maeda, Hirotoshi Ichikawa, Naoya Sugimoto
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Abstract
A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes, wherein a barrier layer is comprised between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Further noted is a projection apparatus comprising such-configured mirror device.
Claims17
A mirror device, comprising:
- a plurality of electrodes disposed on a substrate;
- a hinge connected to at least one of the electrodes and the hinge stands on said substrate extending along substantially a vertical direction from the substrate;
- and
- said hinge support a mirror disposed on top of said hinge along substantially a horizontal direction wherein a cross sectional area of said hinge near the electrode is less than or equal to a cross sectional area of said hinge near said mirror.
A mirror device, comprising:
- a plurality of electrodes disposed on a substrate;
- a hinge electrically connected to at least one of the electrodes and the hinge stands on said substrate extending along substantially a vertical direction from said substrate;
- and
- said hinge support a mirror disposed on top of said hinge along substantially a horizontal direction wherein a width of said hinge is greater than or equal to a length of said hinge and said length of said hinge is greater than a thickness of said hinge.
A mirror device, comprising:
- a plurality of electrodes disposed on a substrate wherein at least one of the electrodes is disposed inside the substrate under a top surface of said substrate and others electrodes are disposed on top of said top surface of said the substrate.
A mirror device, comprising:
- a plurality of electrodes disposed on a substrate;
- at least one of the electrodes is connected to a via connector constituting a conductive wire disposed in a via hole opened in said substrate;
- and at least another electrode is disposed on a same layer as the via connector.
A projection apparatus comprising a mirror device including a plurality of mirror elements for reflecting an incident light projected from a light thereto wherein:
- the mirror device further comprises a mirror disposed on top of and supported on a vertical hinge extending substantially along a vertical direction from a substrate;
- and
- a hinge electrode disposed on the substrate and electrically connected to the hinge, and
- a control circuit including a capacitor placed inside the substrate, and an electrode disposed inside said substrate under a top surface of said substrate and connected to the control circuit.
Dependencies are inferred from the claim text.