Micro devices having anti-stiction materials

A method of fabricating a tiltable micro mirror plate, comprising:

• forming a post on a substrate;
• forming projection on the substrate;
• disposing a sacrificial material over the substrate;
• depositing one or more layers of structural materials over the sacrificial material;
• removing at least a portion of the sacrificial material to form the tiltable micro mirror plate in connection with the post, wherein the tiltable micro mirror plate is movable between a first position in which the tiltable micro mirror plate is separated from the projection and a second position in which the tiltable micro mirror plate is in contact with the projection on the substrate;
• and
• forming a carbon layer on at least one of a surface of the micro mirror plate and a surface of the projection on the substrate to reduce stiction between the micro mirror plate and the projection on the substrate.

A micro device, comprising:

• a landing stop on a substrate;
• a post on the substrate;
• a deflectable member in connection with the post;
• a component in connection with the deflectable member, wherein the component is movable between a first position in which the component is separated from the landing stop and a second position in which the component is in contact with the landing stop;
• and
• a carbon layer on at least one of a surface of the component or a surface of the landing stop to reduce stiction between the component and the landing stop on the substrate.

A micro device, comprising:

• a stationary first component on a substrate, the first component having a first surface;
• a moveable second component having a second surface, wherein the second component is configured to move into contact with the first surface;
• and
• a carbon layer on at least one of the first surface and the second surface to reduce stiction between the first component and the second component.