Graphics engine for high precision lithography
AssigneeMicronic Laser Systems AB
InventorsMartin Olsson, Stefan Gustavson, Torbjorn Sandstrom, Per Elmfors
Life of this patent
Estimating the term…
Abstract
The present invention includes a method to use a phase modulating micromirror array to create an intensity image that has high image fidelity, good stability through focus and good x-y symmetry. Particular aspects of the present invention are described in the claims, specification and drawings.
Claims22
A method of calculating overlap regions within a micromirror array that includes a multitude of micromirrors and is used to render an image in a series of overlapping exposures, the method including:
- mapping a work piece into overlap regions, corresponding to patterns of intended energy contributions from a plurality of overlapping exposures to irradiation relayed by the micromirror array;
- rendering many polygons to gray scaled pixel values using a plurality of rendering engines operating in parallel;
- calculating exposure values for the gray scaled pixel values, taking into account the overlap regions;
- contouring the exposure values based on individual micromirror characteristics;
- and
- outputting the contoured exposure values to one or more mirror pixel drivers.
A method of calculating overlap regions within a micromirror array that includes a multitude of micromirrors and is used to render an image in a series of overlapping exposures, the method including:
- mapping a work piece into overlap regions, corresponding to patterns of intended energy contributions in multiple passes of irradiation;
- irradiating an area of the work piece with energy;
- recording the energy applied to the area for the overlap regions in the area;
- and
- adjusting irradiation of particular overlap regions of the area during subsequent exposure passes based on the recorded energy applied to the particular overlap regions.
A method of contouring the exposure values based on individual micromirror characteristics, including:
- providing an array of compensation functions that are associated with individual micromirrors in a micromirror array, wherein the compensation functions transfer illumination data values to driving voltages;
- and
- for an individual micromirror, converting illumination data values to driving voltages by applying the compensation function corresponding to the individual micromirror.
Dependencies are inferred from the claim text.