Substrate measuring method, computer-readable recording medium recording program thereon, and substrate measuring system

A computer-readable recording medium recording a computer program thereon for causing a computer to control a substrate measuring method performed in a substrate measuring system,

• said substrate measuring method being a measuring method of measuring processing states of a plurality of substrates, the substrates having been successively transferred and subjected to processing, said method further comprising the steps of:
• for measurement of the processing states at a plurality of measurement points within the substrate, dividing the plurality of measurement points within the substrate in advance, and performing the measurements at the divided measurement points for different substrates for each of the measurement points, and combining measurement results at the measurement points of the substrates.

A substrate measuring system for measuring processing states of a plurality of substrates, the substrates having been successively transferred and subjected to processing, said system comprising:

• a measuring unit for measuring processing states of a substrate at a plurality of measurement points within the substrate, and
• a control unit for dividing the plurality of measurement points within the substrate in advance, performing the measurements at the divided measurement points using different substrates for each of the measurement points, and combining measurement results at the measurement points of the substrates.