US 2008/0074651 A1 · Measurement apparatus and measurement method

Abstract

According to the present invention, there is provided a measurement apparatus having a measurement light source for emitting measurement light, a projection unit on which reflected light formed when the measurement light is reflected from the mirror plane is projected as a projected light spot, an image pickup unit for picking up an image of the projection unit on which the reflected light is projected as the projected light spot, a control unit for controlling an inclination of the mirror plane and a measurement unit for measuring a quantity of movement of the projected light spot, which moves according to a change of the inclination of the mirror plane, on the basis of the image of the projection unit. This enables the measurement of a deflection characteristic of a mirror system having the mirror plane variable to arrange the inclination within a short period of time and with high accuracy.

Claims19

Dependent claims

A measurement apparatus, which measures a characteristic of a mirror system having a mirror plane variable to arrange an inclination, comprising:

a measurement light source for emitting measurement light onto the mirror plane;
a projection unit on which reflected light formed when the measurement light emitted from said measurement light source is reflected from said mirror plane is projected as a projected light spot;
an image pickup unit for picking up an image of said projection unit on which the reflected light is projected as the projected light spot;
a control unit for controlling the inclination of said mirror plane;
and
a measurement unit for measuring a quantity of movement of the projected light spot, which moves according to a change of the inclination of said mirror plane controlled by said control unit, on the basis of the image of said projection unit picked up by said image pickup unit.

3 more elements

A measurement method of measuring a characteristic of a mirror system having a mirror plane variable to arrange an inclination, comprising:

an emission step of emitting measurement light onto the mirror plane;
a projection step in which reflected light formed when the measurement light emitted in said emission step is reflected from said mirror plane is projected as a projected light spot onto a projection unit;
an image pickup step of picking up an image of said projection unit on which the reflected light is projected as the projected light spot in said projection step;
a control step of controlling the inclination of said mirror plane;
and
a measurement step of measuring a quantity of movement of the projected light spot, which moves according to a change of the inclination of said mirror plane controlled in said control step, on the basis of the image of said projection unit picked up in said image pickup step.

3 more elements

Dependencies are inferred from the claim text.

Measurement apparatus and measurement method

Life of this patent

Measurement apparatus and measurement method

Life of this patent

Abstract

Claims19