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US 2008/0074635 A1Published application
Supporting apparatus, exposure apparatus, and device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorAtsushi Kimura
Life of this patent
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Abstract
A supporting apparatus which supports a movable element by a bearing is provided with a moment reducing unit which exerts a force on a portion of the movable element which is different from a portion supported by the bearing. The moment reducing unit reduces a moment that acts on the movable element when the portion of the movable element which is supported by the bearing changes as the movable element moves. This stabilizes the attitude of the movable element.
Claims20
A supporting apparatus for supporting a movable element, comprising:
- a bearing unit which supports said movable element;
- and
- a moment reducing unit which exerts a force on a position of said movable element which is different from a position supported by said bearing unit so as to reduce a moment that acts on said movable element when the position of said movable element which is supported by said bearing unit changes as said movable element moves.
A supporting apparatus for supporting a movable element, comprising:
- a bearing unit which supports said movable element;
- and
- a first member, wherein attraction force is generated between said first member and said movable element,
- wherein said bearing unit includes a static pressure fluid bearing, a gas recovery portion which recovers gas supplied from said static pressure fluid bearing and a second member, wherein attraction force is generated between said second member and said movable element,
- said static pressure fluid bearing and said second member are surrounded by said gas recovery portion, and
- said first member is arranged outside said gas recovery portion.
3 more elements
Dependencies are inferred from the claim text.