Observational liquid/gas environment combined with specimen chamber of electron microscope
AssigneeBing-Huan LEE
InventorsChih-Yu Chao, Wen-Jiunn Hsieh
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AssigneeBing-Huan LEE
InventorsChih-Yu Chao, Wen-Jiunn Hsieh
Estimating the term…
An observational liquid/gas environment combined with a specimen chamber and two pole pieces of an electron microscope includes at least two buffer chambers, a plurality of spacers, and a gas source. The buffer chambers are formed by the spacers and the two pole pieces, located at an upper side and a lower side of the specimen chamber respectively. The spacers have inner and outer apertures abutting the buffer chambers. All of the inner and outer apertures are coaxially aligned with one another, crossing a path that the electron beam of the electron microscope passes. The buffer chambers are connected with a gas-pumping source. The gas source is connected with the specimen chamber. The distance between the at least two inner apertures is smaller than that of the two pole pieces. The spacers having the inner apertures are located in the specimen chamber or the electron beam through tunnels.
An observational liquid/gas environment combined with a specimen chamber of an electron microscope, said electron microscope having two pole pieces defined as an upper pole piece and a lower pole piece mounted at an inner upper side thereof and an inner lower side thereof respectively, an electron beam through tunnel being formed at a center of each of said two pole pieces for penetration of said electron beam, said two pole pieces being spaced from each other for a predetermined interval, said specimen chamber being located between said two pole pieces, said environment comprising:
An observational liquid/gas environment combined with a specimen chamber of an electron microscope, said electron microscope having two pole pieces defined as an upper pole piece and a lower pole piece mounted at an inner upper side thereof and an inner lower side thereof respectively, an electron beam through tunnel being formed at a center of each of said two pole pieces for penetration of said electron beam, said two pole pieces being spaced from each other for a predetermined interval, said specimen chamber being located between said two pole pieces, said environment comprising:
An observational liquid/gas environment combined with a specimen chamber of an electron microscope, said electron microscope having two pole pieces defined as an upper pole piece and a lower pole piece mounted at an inner upper side thereof and an inner lower side thereof respectively, an electron beam through tunnel being formed at a center of each of said two pole pieces for penetration of said electron beam, said two pole pieces being spaced from each other for a predetermined interval, said specimen chamber being located between said two pole pieces, said environment comprising:
Dependencies are inferred from the claim text.