Optical Fiber Probe, Optical Detection Device, And Optical Detection Method

An optical fiber probe, comprising:

• a core for propagating light from a light source, a front end surface of said core being covered by a light-shielding layer for seeping out near-field light, the front end surface of said core including a first exit section for emitting the propagating light and a second exit section for seeping out the near-field light, said first exit section and said second exit section being formed in a concentric manner,
• wherein
• the first exit section is formed on a peripheral side, and
• a tilt angle of a normal of the first exit section relative to an optical axis of the propagating light is different from a tilt angle of a normal of the second exit section relative to the optical axis of the propagating light.

An optical detection device, comprising:

• a light source;
• an optical fiber probe including a core for propagating light from the light source, an optical probe being formed at a front end of said core;
• a movement control unit configured to move the optical fiber probe and a surface of a sample to approach or depart from each other so that a light spot of the propagating light or near-field light seeping out from the front end of the core is formed on the surface of the sample;
• and
• a detection unit configured to detect light from the surface of the sample,
• wherein
• the optical probe includes a first exit section on the front end surface of the core for emitting the propagating light and a second exit section on the front end surface of the core for seeping out the near-field light,
• the first exit section and the second exit section are formed in a concentric manner, the first exit section is formed on a peripheral side, and
• a tilt angle of a normal of the first exit section relative to an optical axis of the propagating light is different from a tilt angle of a normal of the second exit section relative to the optical axis of the propagating light.

An optical detection device, comprising:

• a light source;
• an optical fiber probe including a core for propagating light from the light source, an optical probe being formed at a front end of said core, the front end surface of said core being covered by a light-shielding layer for seeping out near-field light;
• a movement control unit configured to move the optical fiber probe and a surface of a sample to approach or depart from each other so that a light spot of the propagating light or near-field light seeping out from the front end of the core is formed on the surface of the sample;
• and
• a detection unit configured to detect light from the surface of the sample,
• wherein
• the optical probe includes a first exit section on the front end surface of the core for emitting the propagating light and a second exit section on the front end surface of the core for seeping out the near-field light,
• the first exit section and the second exit section are formed in a concentric manner,
• the first exit section is formed on a peripheral side, and
• a tilt angle of a normal of the first exit section relative to an optical axis of the propagating light is different from a tilt angle of a normal of the second exit section relative to the optical axis of the propagating light.

An optical detection method, comprising the steps of:

• propagating light from a light source to a core of an optical fiber probe, said optical fiber probe including an optical probe being formed at a front end of the core, the optical probe including a first exit section on the front end surface of the core for emitting the propagating light and a second exit section on the front end surface for seeping out the near-field light, the first exit section and the second exit section being formed in a concentric manner, the first exit section being formed on a peripheral side, and a tilt angle of a normal of the first exit section relative to an optical axis of the propagating light being different from a tilt angle of a normal of the second exit section relative to the optical axis of the propagating light;
• moving the optical fiber probe and a surface of a sample to approach or depart from each other so that a light spot of the propagating light or near-field light seeping out from the front end of the core is formed on the surface of the sample;
• and
• detecting light from the surface of the sample.

An optical detection method, comprising the steps of:

• propagating light from a light source to a core of an optical fiber probe, said optical fiber probe including an optical probe being formed at a front end of the core, the optical probe including a first exit section on the front end surface of the core for emitting the propagating light and a second exit section on the front end surface for seeping out the near-field light, the first exit section and the second exit section being formed in a concentric manner, the first exit section being formed on a peripheral side, a tilt angle of a normal of the first exit section relative to an optical axis of the propagating light being different from a tilt angle of a normal of the second exit section relative to the optical axis of the propagating light, and at least the second exit section of the front end surface being covered by a light-shielding layer for seeping out near-field light;
• moving the optical fiber probe and a surface of a sample to approach or depart from each other so that a light spot of the propagating light or the near-field light seeping out from the front end of the core is formed on the surface of the sample;
• and
• detecting light from the surface of the sample.