Catalyst-aided chemical processing method and apparatus

A catalyst-aided chemical processing method comprising:

• putting a workpiece in a processing liquid in which halogen-containing molecules are dissolved;
• and
• bringing a catalyst, composed of platinum, gold, a ceramic solid catalyst, molybdenum or a molybdenum compound, into contact with or close proximity to a surface to be processed of the workpiece, thereby processing the workpiece;
• wherein at least one of a voltage application process for applying a voltage between the surface to be processed of the workpiece and the catalyst during the processing, a light irradiation process for irradiating the surface to be processed of the workpiece with light during or before the processing, a workpiece temperature control process for controlling the temperature of the workpiece during the processing, a processing liquid temperature control process for controlling the temperature of the processing liquid, and a catalyst temperature control process for controlling the temperature of the catalyst is carried out, either singly or in a combination of two or more, in the processing of the workpiece.

A catalyst-aided chemical processing apparatus comprising:

• a platen having a surface comprised of a catalyst composed of molybdenum or a molybdenum compound;
• a holder for holding a workpiece and bringing a surface to be processed of the workpiece into contact with the platen;
• a processing liquid supply section for supplying a processing liquid, in which halogen-containing molecules are dissolved, between the platen and the workpiece held by the holder and kept in contact with the platen;
• and
• a drive section for moving the platen and the workpiece, held by the holder and kept in contact with the platen, relative to each other.

A catalyst-aided chemical processing apparatus comprising:

• a platen having a surface comprised of a catalyst composed of platinum, gold, a ceramic solid catalyst, molybdenum or a molybdenum compound;
• a holder for holding a workpiece and bringing a surface to be processed of the workpiece into contact with the platen;
• a processing liquid supply section for supplying a processing liquid, in which halogen-containing molecule are dissolved, between the platen and the workpiece held by the holder and kept in contact with the platen;
• a drive section for moving the platen and the workpiece, held by the holder and kept in contact with the platen, relative to each other;
• and
• at least one of a power source for applying a voltage between the surface to be processed of the workpiece and the catalyst, a light source for irradiating the surface to be processed of the workpiece with light, a workpiece temperature control mechanism for controlling the temperature of the workpiece during processing, a processing liquid temperature control mechanism for controlling the temperature of the processing liquid, and a catalyst temperature control mechanism for controlling the temperature of the catalyst.

A catalyst-aided chemical processing method comprising:

• putting a workpiece in an oxidizing processing liquid;
• bringing a solid catalyst, having an acidic or basic nature, into contact with or close proximity to a surface to be processed of the workpiece;
• and
• dissolving surface atoms of the surface to be processed, which is in contact with or close proximity to the solid catalyst, in the oxidizing processing liquid, thereby processing the surface of the workpiece.

A catalyst-aided chemical processing method comprising:

• irradiating with light a surface to be processed of a workpiece put in a processing liquid;
• bringing a solid catalyst, having an acidic or basic nature, into contact with or close proximity to the surface to be processed of the workpiece;
• and
• dissolving surface atoms of the surface to be processed, which is in contact with or close proximity to the solid catalyst, in the processing liquid, thereby processing the surface of the workpiece.

A catalyst-aided chemical processing apparatus comprising:

• a platen having a surface comprised of a fixed solid catalyst having an acidic or basic nature;
• a holder for holding a workpiece and bringing a surface to be processed of the workpiece into contact with or close proximity to the surface of the platen;
• an oxidizing processing liquid supply section for supplying an oxidizing processing liquid between the platen and the workpiece held by the holder and kept in contact with or close proximity to the surface the platen;
• and
• a drive section for moving the platen and the workpiece, held by the holder and kept in contact with or close proximity to the platen, relative to each other.

A catalyst-aided chemical processing apparatus comprising:

• a platen having a surface comprised of a fixed solid catalyst having an acidic or basic nature;
• a holder for holding a workpiece and bringing a surface to be processed of the workpiece into contact with or close proximity to the surface of the platen;
• a processing liquid supply section for supplying a processing liquid between the platen and the workpiece held by the holder and kept in contact with or close proximity to the surface the platen;
• a light source for irradiating the surface to be processed of the workpiece with light;
• and
• a drive section for moving the platen and the workpiece, held by the holder and kept in contact with or close proximity to the platen, relative to each other.

A catalyst-aided chemical processing method comprising:

• putting a workpiece in a processing liquid containing an oxidizing agent;
• bringing a solid catalyst, capable of decomposing the oxidizing agent, into contact with or close proximity to a surface to be processed of the workpiece;
• and
• removing a compound from the workpiece or dissolving the compound in the processing liquid, said compound being formed by a chemical reaction between an active species having a strong oxidizing power, generated on the solid catalyst, and a surface atom of the workpiece, thereby processing the workpiece;
• wherein at least one of a light irradiation means for irradiating the surface to be processed of the workpiece with light during the processing, a voltage application means for applying a voltage between the surface to be processed of the workpiece and the solid catalyst during the processing, a catalyst temperature control means for controlling the temperature of the catalyst, a workpiece temperature control means for controlling the temperature of the workpiece, and a processing liquid temperature control means for controlling the temperature of the processing liquid is applied, either singly or in a combination of two or more, to the processing of the surface.

A catalyst-aided chemical processing apparatus comprising:

• a flat rotary platen having a surface comprised of a solid catalyst capable of decomposing an oxidizing agent;
• and
• a holder having a rotating shaft eccentric to the rotating shaft of the platen;
• wherein a surface to be processed of a workpiece is processed and flattened by supplying a processing liquid containing the oxidizing agent between the surface of the solid catalyst and the surface to be processed of the workpiece, and rotating the workpiece, held by the holder, and the rotary platen while pressing the workpiece against the platen at a predetermined pressure;
• and
• wherein at least one of a light irradiation means for irradiating the surface to be processed of the workpiece with light during the processing, a voltage application means for applying a voltage between the surface to be processed of the workpiece and the solid catalyst during the processing, a solid catalyst temperature control means for controlling the temperature of the solid catalyst, a workpiece temperature control means for controlling the temperature of the workpiece, and a processing liquid temperature control means for controlling the temperature of the processing liquid is applied, either singly or in a combination of two or more, to the processing of the surface.

A catalyst-aided chemical processing apparatus comprising:

• a processing liquid containing an oxidizing agent and dispersing a solid catalyst, capable of decomposing the oxidizing agent, in a powdery form therein;
• and
• a processing liquid supply section for supplying the powdery solid catalyst to a surface to be processed of a workpiece by a flow of the processing liquid;
• wherein at least one of a light irradiation section for irradiating the surface to be processed of the workpiece with light, a voltage application section for applying a voltage between the surface to be processed of the workpiece and the solid catalyst, a solid catalyst temperature control section for controlling the temperature of the solid catalyst, a workpiece temperature control section for controlling the temperature of the workpiece, and a processing liquid temperature control section for controlling the temperature of the processing liquid is applied, either singly or in a combination of two or more, to processing of the surface.