Method of making first surface mirror with oxide graded reflecting layer structure

A method of making a mirror, the method comprising:

• causing a substrate to move past at least first and second sputtering targets, wherein a first low flux area is located at an input side of the first target, a high flux area is located below the first and second sputtering targets, and a second low flux area is located at an output side of the second target;
• sputter-depositing a reflective layer, for reflecting visible light, on the substrate using at least the first and second sputtering targets;
• introducing at least oxygen gas into one or both of the low flux areas and introducing an inert gas into the high flux area as the glass substrate is moving past the sputtering targets, so as to sputter deposit the reflective layer on the substrate in a manner such that the reflective layer of the mirror has a metallic or substantially metallic central portion that is formed using both of the first and second targets and a metal oxide portion located at a bottom portion and/or top portion of the reflective layer, the metal oxide portion of the reflective layer comprising an oxide of the same metal provided in the central portion of the reflective layer;
• and
• depositing at least a first dielectric layer on the substrate over at least the reflective layer.