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US 2008/0072818 A1Published application
Systems and Methods for Nanowire Growth and Harvesting
AssigneeNanosys, Inc.
InventorsShahriar Mostarshed, Linda Romano
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Abstract
The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrificial growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.
Claims8
A method for producing nanowires comprising:
- (a) providing a substrate material having one or more nucleating particles deposited thereon in a reaction chamber;
- (b) introducing a precursor gas mixture into the reaction chamber to initiate nanowire growth;
- (c) introducing an independent chlorine gas species separate from the precursor gas mixture into the reaction chamber;
- and
- (c) growing nanowires at the site of the nucleating particles.
2 more elements
Dependencies are inferred from the claim text.