Method and device for fabricating nano-structure with patterned particle beam
AssigneeInstrument Technology Research Center, National Applied Research Laboratories
InventorsJyh-Shin Chen, Liang-Chiun Chao, Sheng-Yuan Chen, Hsiao-Yu Chou
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Abstract
The present invention provides a method and an apparatus for producing a two-dimensional patterned beam, e.g. a two-dimensional patterned and focused ion beam, for fabricating a nano-structure on a substrate with the precursor gas. In comparison with the conventional focused ion beam that is applied for fabricating a dot-like nano-structure the method is more simplified and easy to be achieved.
Claims25
A fabrication method for a nano-structure with a patterned particle beam, comprising:
- providing a particle beam;
- patterning said particle beam into a two-dimensional patterned particle beam;
- exposing a substrate under said two-dimensional patterned particle beam;
- and
- providing a precursor gas to react with said two-dimensional patterned particle beam, whereby said nano-structure is formed on said substrate.
A fabrication method for producing a two-dimensional nano-structure, comprising:
- providing a two-dimensional patterned particle beam;
- exposing a substrate to said two-dimensional patterned particle beam;
- and
- providing a precursor gas reacting with said two-dimensional patterned particle beam, and thereby a nano-structure being formed on said substrate.
A fabrication apparatus for producing a patterned particle beam, comprising:
- a particle source providing a particle beam;
- and
- a patterning device configured for patterning said particle beam so as to generate said patterned particle beam, comprising a structure of plural wires and a sleeve covering said structure of plural wires, wherein said structure of plural wires has a lengthwise direction parallel to that of said sleeve.
A fabrication apparatus for producing a patterned particle beam, comprising:
- a particle source providing a particle beam;
- and
- a patterning device comprising a pillar-shaped structure and a pattern cover disposed on a surface above said pillar-shaped structure, wherein said particle beam passes through said pattern cover and thereby said patterned particle beam is produced.
A fabrication apparatus for producing a nano-structure with a patterned particle beam, comprising:
- a patterned particle source providing a patterned particle beam;
- a gas source providing a precursor gas;
- and
- a holder carrying and moving a substrate disposed thereon, wherein said nano-structure is formed on said substrate by said patterned particle beam reacting with said precursor gas.
Dependencies are inferred from the claim text.