Multiple optical input inspection system
AssigneeOrbotech Ltd.
InventorsSAKI HAKIM, Zeev Smilansky
Life of this patent
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Abstract
A system and method of inspecting electrical circuits with multiple optical inputs, including: obtaining first and second image data that are generally spatially coincidental but which each include some image data that is different, modifying one of the images by employing the other image so as to produce an enhanced representation of the electrical circuit, and inspecting the enhanced representation for defects.
Claims39
1-25. (canceled)
A method of inspecting electrical circuits comprising:
- obtaining first image data relating to at least part of an electrical circuit in at least a first spectral range;
- obtaining second image data relating to at least part of an electrical circuit in at least a second spectral range;
- and
- providing an enhanced contrast representation of the electrical circuit by non-linearly combining said first image data and said second image data.
A method of inspecting electrical circuits formed on different surfaces of a non-opaque substrate comprising:
- obtaining image data relating to at least part of an electrical circuit, and
- enhancing said image data to provide enhanced inspection output information which decreases artifacts resulting from the non-opaque characteristic of the substrate.
A method of inspecting electrical circuits comprising:
- obtaining first image data relating to at least part of an electrical circuit;
- obtaining second image data relating to at least part of an electrical circuit;
- and
- non-linearly combining said first image data and said second image data to form a pseudo image, and supplying said pseudo-image to a high-sure/low-sure region classifier.
44-68. (canceled)
A system for inspecting electrical circuits comprising:
- a first image data acquisition assembly, obtaining first image data relating to at least part of an electrical circuit in at least a first spectral range;
- a second image data acquisition assembly obtaining second image data relating to at least part of an electrical circuit in at least a second spectral range;
- and
- an enhanced contrast representation generator providing an enhanced contrast representation of the electrical circuit by non-linearly combining said first image data and said second image data.
A system for inspecting electrical circuits formed on different surfaces of a non-opaque substrate comprising:
- an image data acquisition assembly obtaining image data relating to at least part of an electrical circuit, and
- an image data enhancement assembly, enhancing said image data to provide enhanced inspection output information which decreases artifacts resulting from the non-opaque characteristic of the substrate.
A system for inspecting electrical circuits comprising:
- a first image data acquisition assembly, obtaining first image data relating to at least part of an electrical circuit;
- a second image data acquisition assembly obtaining second image data relating to said at least part of an electrical circuit;
- and
- a pseudo-image generator non-linearly combining said first image data and said second image data, said pseudo-image generator being operative to supply a pseudo-image of said part of said electrical circuit constructed from said first and second image data to a high-sure/low-sure region classifier.
Dependencies are inferred from the claim text.