US 2007/0190913 A1 · Polishing apparatus and polishing method

Abstract

A polishing apparatus comprises a first polishing table having a first polishing surface, a substrate carrier for holding a substrate and positioning the substrate so as to bring a surface of the substrate into contact with the first polishing surface, a pressing mechanism for pressing, against the first polishing surface, the surface of the substrate which has been brought into contact with the first polishing surface by the substrate carrier, a retainer ring mounted on the substrate carrier so as to surround the substrate which has been pressed against the first polishing surface by the pressing mechanism, and a retainer-ring-position-adjustment mechanism for adjustably positioning the retainer ring relative to the substrate, which has been pressed against the first polishing surface, in directions toward and away from the first polishing surface.

Claims13

Dependent claims

A substrate carrier system comprising:

a substrate carrier for holding a substrate and positioning the substrate so as to bring a surface of the substrate into contact with a polishing surface during polishing;
a substrate carrier drive shaft connected to said substrate carrier for driving, raising and lowering said substrate carrier;
a ball screw and a ball nut connected to said substrate carrier drive shaft;
a pulse motor coupled to said ball screw for raising and lowering said substrate carrier until at a desired vertical position;
a fluid pressure source to apply a pressurized fluid above the substrate;
and
a control mechanism for fixing a vertical position of said substrate carrier by said pulse motor, said ball screw and said ball nut until said substrate carrier is fixed at a desired vertical position, and supplying a pressurization fluid above said substrate to press the substrate against said polishing surface.

4 more elements

Dependencies are inferred from the claim text.

Polishing apparatus and polishing method

Life of this patent

Polishing apparatus and polishing method

Life of this patent

Abstract

Claims13