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US 2007/0190904 A1Published application
Wafer holder and wafer conveyor equipped with the same
AssigneeSamsung Electronics Co., Ltd.
InventorsTae-Kyoung Kim, Yun-Jung Jee, Kyoung-Su Shin, Chung-Sam Jun
Life of this patent
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Abstract
The present invention is directed to a wafer holder and a related wafer conveyor system. The wafer holder holds a wafer and moves horizontally within a chamber. A contact area between the wafer and the wafer holder is reduced, and potential contaminants generated by ear between components of the wafer holder are trapped by an airtight cover. Since the wafer holder moves horizontally while being fixed to a guide rail, the wafer conveyor system reduces friction between the guide rail and the wafer holder.
Claims9
A wafer conveyor system, comprising:
- guide rails disposed inside a chamber;
- a driving roller disposed on one end of each guide rail and a passive roller disposed on the other end, wherein an inner surface of each guide rail contacts and wraps around the driving roller and passive roller;
- and
- a wafer holder disposed between the guide rails, wherein the wafer holder is connected to the guide rails allowing the wafer holder to move in conjunction with a driving direction for the guide rails.
1 more element
Dependencies are inferred from the claim text.