Method for using biomaterials as reagent for nano-patterning
AssigneeAcademia Sinica
InventorsChii-Dong Chen, Hung-Yi Lin, Pei-Yin Chi, Li-Chu Tsai
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Abstract
A pattern transfer method includes providing a substrate, forming a first biomaterial over the substrate, exposing the first biomaterial to a pattern writing agent in a manner consistent with a pattern to be transferred, forming a second biomaterial over the first biomaterial, wherein the second biomaterial reacts and bonds with portions of the first biomaterial not exposed to the pattern writing agent, and does not react and bond with portions of the first biomaterial exposed to the pattern writing agent.
Claims24
A pattern transfer method, comprising:
- providing a substrate;
- forming a first biomaterial over the substrate;
- exposing the first biomaterial to a pattern writing agent in a manner consistent with a pattern to be transferred;
- and
- forming a second biomaterial over the first biomaterial,
- wherein the second biomaterial reacts and bonds with portions of the first biomaterial not exposed to the pattern writing agent, and does not react and bond with portions of the first biomaterial exposed to the pattern writing agent.
A pattern transfer method, comprising:
- providing first oligonucleotides over a substrate;
- writing a pattern onto the first oligonucleotides;
- and
- providing second oligonucleotides to hybridize with the first oligonucleotides.
Dependencies are inferred from the claim text.