Device for preventing the displacement of an optical element
AssigneeCarl Zeiss SMT GmbH
InventorsChristian Zengerling, Armin Schoeppach, Ulrich Weber
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Abstract
In a device (1) for preventing the creeping of an optical element (2), in particular a lens or a mirror, the optical element (2) is connected to a mount (3) via connecting members (4) arranged on the circumference of the optical element (2). The position of the optical element (2) in an objective (PL) deviates from the vertical axial position. In order to compensate the dead weight at least of the optical element (2) at least one holding element (7) via which the optical element (2) is held on a housing part of the objective (PL) is provided in addition to the connecting members (4).
Claims55
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A device for connecting an optical element to a mount of an objective, the optical element being connected to the mount via connecting members arranged on the circumference of the optical element, and the mount axis of the optical element being inclined at an angle to the direction of the weight force, characterized in that in order to compensate the weight force of the optical element at least one spring element via which the optical element is held on a housing part of the objective is provided in addition to the connecting members.
A projection objective for semiconductor lithography having at least one optical element, the optical element being connected to a mount via connecting members arranged on the circumference of the optical element, and the position of the optical element deviating from the vertical axial position, characterized in that in order to compensate the dead weight at least of the optical element at least one holding element via which the optical element is held on a housing part is provided in addition to the connecting members.
A device for connecting an optical element to a mount of an objective, the optical element being connected to the mount via connecting members arranged on the circumference of the optical element, and the mount axis of the optical element being inclined at an angle to the direction of the weight force, in order to compensate the weight force of the optical element at least one holding element via which the optical element is held on a housing part of the objective being provided in addition to the connecting members, characterized in that the force exerted on the optical element by the holding element remains approximately constant in the event of small deflections of the optical element.
Dependencies are inferred from the claim text.