Reference specimen for microscope and manufacturing method thereof
OwnerYuichiro Kubo, Katsuhide Shimmoinventors
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Abstract
In a reference specimen for a microscope, for use in calibration or inspection of a microscope, having an uneven structure in which convex portions having a prescribed height or concave portions having a prescribed depth are arrayed in a prescribed cycle on a substrate surface, as a material forming the uneven structure, a hydrolytically cured product of a metal alkoxide, or a cured product of an epoxy resin or an acrylic resin is used. The fine uneven structure is manufactured in the following manner. It is transferred by pressing a master plate against a molding material coated on a substrate, and cured, followed by release.
Claims11
A reference specimen for a microscope, for use in calibration or inspection of a microscope, comprising:
- an uneven structure in which convex portions having a prescribed height or concave portions having a prescribed depth are arrayed in a prescribed cycle on a substrate surface;
- wherein a material forming the uneven structure includes a hydrolytically cured product of a metal alkoxide.
The reference specimen for a microscope, for use in calibration or inspection of a microscope, comprising:
- an uneven structure in which convex portions having a prescribed height or concave portions having a prescribed depth are arrayed in a prescribed cycle on a substrate surface;
- wherein a material forming the uneven structure includes a cured epoxy resin or acrylic resin.
A method for manufacturing a reference specimen for a microscope, for use in calibration or inspection of a microscope, including an uneven structure having a prescribed height arrayed in a prescribed cycle on a substrate surface, the method sequentially including:
- a coating step of coating a molding material having fluidity on a substrate, or filling and coating it in a molding die;
- a molding step of making the substrate and the molding die face each other across the molding material having fluidity interposed therebetween, and pressurizing them;
- and
- a curing step of applying an energy of heat or light thereto under pressure, and curing the molding material in the molding die;
- and
- a releasing step of releasing the molding die.
Dependencies are inferred from the claim text.