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US 2007/0182081 A1Published application
Spin unit in wafer spinner apparatus and method of repositioning spin unit
OwnerSeok-gi Siinventor
Life of this patent
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Abstract
A wafer spinner apparatus includes a main body, and a plurality of spin units disposed in the main body to open and close in a rack configuration, each spin unit including a stepping motor disposed in the main body to move a spin unit in a horizontal direction, a base plate coupled to the stepping motor, a reference sensor disposed in the main body to determine a position deviation of the spin unit, and a spin chuck disposed on the base plate.
Claims20
A wafer spinner apparatus comprising:
- a main body;
- and
- a plurality of spin units disposed in the main body to open and close in a rack configuration, each spin unit including:
- a stepping motor disposed in the main body to move a selected spin unit in a horizontal direction;
- a base plate coupled to the stepping motor;
- a reference sensor disposed in the main body to determine a position deviation of the spin unit;
- and
- a spin chuck disposed on the base plate.
5 more elements
A method of repositioning a spin unit in a wafer spinner apparatus, the method comprising;
- preparing a wafer spinner apparatus including a plurality of spin units in a rack configuration;
- opening the spin unit using a stepping motor disposed in the wafer spinner apparatus;
- closing the spin unit and returning the spin unit to an initial position using the stepping motor;
- and
- checking the initial position of the spin unit using an initial position checking pulse of the stepping motor and a reference sensor disposed in the wafer spinner apparatus.
2 more elements
Dependencies are inferred from the claim text.