Wafer stage having an encapsulated central pedestal plate
OwnerMing-Tung Wang, Sheng-Yuan Chen +8inventors
InventorsMing-Tung Wang, Sheng-Yuan Chen, Chin-Yung Liu, Peng-Yih Peng, Shang-Kuang Wu, Wen-Kun Lo, Fu-Yi Lai, Cheng-Bang Fan, Jeng-Hung Lue, Chien-Chih Ho
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Abstract
A wafer stage includes a bottom insulator plate secured on a bottom portion of the processing chamber; a central pedestal plate mounted on the bottom insulator plate; and a removable top insulator cover having a chamber fittingly accommodating the central pedestal plate and the bottom insulator plate, wherein the top insulator cover has a flat top surface on which a wafer is placed.
Claims11
A wafer stage for placing a wafer in a processing chamber, comprising:
- a bottom insulator plate secured on a bottom portion of said processing chamber;
- a central pedestal plate mounted on said bottom insulator plate;
- and
- a removable top insulator cover having a chamber fittingly accommodating said central pedestal plate and said bottom insulator plate, wherein said top insulator cover has a flat upper surface for placing said wafer.
A wafer stage of a pre-clean chamber, comprising:
- a bottom insulator plate;
- a central pedestal plate;
- and
- a removable top insulator cover having a chamber fittingly accommodating said central pedestal plate and said bottom insulator plate, wherein said removable top insulator cover and said bottom insulator plate encapsulate said central pedestal plate.
Dependencies are inferred from the claim text.