Supporter and apparatus for cleaning substrates with the supporter, and method for cleaning substrates
AssigneeSamsung Electronics Co., Ltd.
InventorsHun-Jung YI, Yong-Kyun KO
Life of this patent
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Abstract
Provided are a supporter and a substrate cleaning apparatus including the supporter, and a method for cleaning substrates. In the apparatus, a guide plate is provided close to an outer surface of an outermost substrate among substrates arranged in a cleaning process. The guide plate is shaped such that cleaning liquid injected toward a lower edge of the outermost substrate flows to an upper edge of the outermost substrate in a substantially vertical direction.
Claims20
An apparatus for cleaning substrates, comprising:
- a treating room;
- a supporter disposed in the treating room during a process, the supporter arranged and structured to support the substrates in a row in an upright position;
- and
- a liquid supplying member disposed in the treating room under the supporter for injecting cleaning liquid onto the substrates,
- wherein the supporter comprises:
- a plurality of supporting rods including slots for receiving edges of the substrates, the supporting rods comprising a first end slot, a second end slot, and interior slots;
- a fixing plate adapted to connect the supporting rods and adapted to fix the supporter to the treating room during a process;
- and
- a first guide plate mounted at a side of the first end slot of the slots of the supporting rods, the first guide plate adapted to allow the cleaning liquid injected under the substrates to substantially vertically flow along an outer surface of an outermost substrate inserted into the first end slot.
A method for cleaning substrates arranged in a row in a substantially upright position by supplying cleaning liquid to the substrate, the method comprising providing a guide plate close to an outer surface of an outermost substrate of the substrates to allow cleaning liquid injected toward a lower edge of the outermost substrate to substantially vertically flow along the outer surface of the outermost substrate in an upward direction.
A supporter for supporting a plurality of substrates in a row in an upright position, the supporter comprising:
- a plurality of supporting rods formed with slots for receiving edges of the substrates;
- and
- a guide plate mounted close to outermost slots of the slots of the supporting rods, the guide plate adapted to allow cleaning liquid injected under the substrates to substantially vertically and upwardly flow along an outer surface of an outermost substrate inserted into the outermost slots.
Dependencies are inferred from the claim text.