Magnetoresistive element manufacturing method and magnetic memory device manufacturing method
OwnerHiroaki Yodainventor
Life of this patent
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Abstract
A magnetoresistive element manufacturing method includes forming a material layer on a substrate, the material layer including a fixed layer, a recording layer, and a first nonmagnetic layer sandwiched between the fixed layer and the recording layer; forming a mask material on the material layer, forming a first mask with a desired pattern by processing the mask material by using imprint lithography, and forming a magnetoresistive element with the desired pattern by processing the material layer by using the first mask.
Claims16
A magnetoresistive element manufacturing method comprising:
- forming a material layer on a substrate, the material layer including a fixed layer, a recording layer, and a first nonmagnetic layer sandwiched between the fixed layer and the recording layer;
- forming a mask material on the material layer;
- forming a first mask with a desired pattern by processing the mask material by using imprint lithography;
- and
- forming a magnetoresistive element with the desired pattern by processing the recording layer, the fixed layer, and the first nonmagnetic layer at once by using the first mask, the magnetoresistive element being a memory element in an magnetic random access memory.
2-4. (canceled)
A magnetic memory device manufacturing method comprising:
- forming a material layer on a substrate, the material layer including a fixed layer, a recording layer, and a nonmagnetic layer sandwiched between the fixed layer and the recording layer;
- forming a mask material on the material layer;
- forming a first mask with a desired pattern by processing the mask material by using imprint lithography;
- forming a magnetoresistive element with the desired pattern by processing the recording layer, the fixed layer, and the nonmagnetic layer at once by using the first mask, the magnetoresistive element being a memory element in an magnetic random access memory;
- and
- forming a bit line and a word line above and under the magnetoresistive element.
14-16. (canceled)
Dependencies are inferred from the claim text.