End effector for transferring a wafer
OwnerChee Tang, Wee Chow +2inventors
InventorsChee Tang, Wee Chow, Wai Yip, Hong Chia
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Abstract
An end effector for transferring a wafer, a method of re-sitting a wafer in a wafer cassette, and a method of calibrating positioning of an end effector for wafer-pick. The end effector comprises a blade for supporting the wafer during transfer, and at least one engagement element coupled to the blade, the engagement element protruding from the blade for engaging the wafer during insertion of the blade into a wafer cassette for re-sitting of the wafer in the cassette.
Claims17
An end effector for transferring a wafer, the end effector comprising,
- a blade for supporting the wafer during transfer;
- and
- at least one engagement element coupled to the blade, the engagement element protruding from the blade for engaging the wafer during insertion of the blade into a wafer cassette for re-seating of the wafer in the cassette.
A method of re-seating a wafer in a wafer cassette, the method comprising,
- inserting of a blade of an end effector into the wafer cassette, and
- engaging the wafer during the inserting of the blade utilising an engagement element coupled to the blade.
A method of calibrating positioning of an end effector for wafer-pick, the method comprising,
- clamping a dummy wafer on a blade of the end effector utilising an engagement element coupled to the blade;
- and
- inserting the blade into a wafer cassette up to a wafer-pick position in which further insertion of the blade is inhibited as a result of the clamped dummy wafer abutting a stopper element of the wafer cassette.
Dependencies are inferred from the claim text.