Micromirror and micromirror device

A micromirror, comprising:

• a holding unit;
• a mirror that is held by the holding unit to be pivotable about a rotation axis of the mirror;
• a first fixed electrode group including a plurality of electrodes fixed to the holding unit;
• a second fixed electrode group including a plurality of electrodes fixed to the holding unit;
• a first movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the first fixed electrode group;
• and
• a second movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the second fixed electrode group;
• wherein the first and second fixed electrode groups are arranged oppositely to each other with respect to the rotation axis of the mirror,
• wherein at least one of the first and second movable electrode groups includes two types of electrodes including a first type electrode located at a position upper than that of one of the first and second fixed electrode groups adjacent to the first type electrode and a second type electrode located at a position lower than that of one of the first and second fixed electrode groups adjacent to the second type electrode,
• wherein in the at least one of the first and second movable electrode groups, the first type electrode and the second type electrode are arranged in a mixed state.

A micromirror, comprising:

• a micromirror unit;
• and
• a supporting unit that holds the micromirror unit, wherein the micromirror unit comprises:
• a holding unit;
• a mirror that is held by the holding unit to be pivotable about a first rotation axis of the mirror;
• a first fixed electrode group including a plurality of electrodes fixed to the holding unit;
• a second fixed electrode group including a plurality of electrodes fixed to the holding unit;
• a first movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the first fixed electrode group;
• and
• a second movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the second fixed electrode group;
• wherein the first and second fixed electrode groups are arranged oppositely to each other with respect to the first rotation axis of the mirror,
• wherein the plurality of electrodes of the first movable electrode group includes at least one electrode located at a position upper than that of neighboring one of the plurality of electrodes of the first fixed electrode group, and includes at least one electrode located at a position lower than that of neighboring one of the plurality of electrodes of the first fixed electrode group,
• wherein the plurality of electrodes of the second movable electrode group includes at least one electrode located at a position upper than that of neighboring one of the plurality of electrodes of the second fixed electrode group, and includes at least one electrode located at a position lower than that of neighboring one of the plurality of electrodes of the second fixed electrode group,
• wherein the micromirror unit is held by the supporting unit to be pivotable about a second rotation axis of the mirror;
• the micromirror further comprising:
• a third fixed electrode group including a plurality of electrodes fixed to the supporting unit;
• a fourth fixed electrode group including a plurality of electrodes fixed to the supporting unit;
• a third movable electrode group including a plurality of electrodes fixed to the holding unit of the micromirror unit and located adjacently to the third fixed electrode group;
• and
• a fourth movable electrode group including a plurality of electrodes fixed to the holding unit of the micromirror unit and located adjacently to the fourth fixed electrode group;
• wherein the third and fourth fixed electrode groups are arranged oppositely to each other with respect to the second rotation axis of the mirror,
• wherein the plurality of electrodes of the third movable electrode group includes at least one electrode located at a position upper than that of neighboring one of the plurality of electrodes of the third fixed electrode group, and includes at least one electrode located at a position lower than that of neighboring one of the plurality of electrodes of the third fixed electrode group,
• wherein the plurality of electrodes of the fourth movable electrode group includes at least one electrode located at a position upper than that of neighboring one of the plurality of electrodes of the fourth fixed electrode group, and includes at least one electrode located at a position lower than that of neighboring one of the plurality of electrodes of the fourth fixed electrode group.