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AssigneeTohoku Pioneer Corporation
InventorsHirosi Abiko, Daisuke Masuda, Shigehiro Umetsu
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Film formation is conducted with a high level of directivity. A film formation source of a vacuum film formation apparatus, includes a material container for housing a film forming material, a heating unit for heating the film forming material inside the material container, and a rectifier provided at an ejection port of the material container. In this source, the rectifier includes a passage partitioned into fine openings, and a set directivity is obtained on the basis of the cross-sectional area Sa of each opening within the rectifier, the distance L from the ejection tip of the rectifier to the film formation target surface, and the film formation rate R for the film forming material at a point on the film formation target surface directly above the center of the rectifier.
A method of manufacturing an organic electroluminescent (EL) device which includes a substrate, a first electrode and a second electrode disposed onto the substrate, and an organic material layer containing an organic luminescent layer sandwiched between the first electrode and the second electrode, the method comprising:
Dependencies are inferred from the claim text.