Mini-environment pod device, an exposure apparatus and a device manufacturing method using the same

An improved pod attachable to an outside surface of a grounded electromagnetic-shielded chamber, the chamber having a door and a flange portion, around the door, on the outside surface and containing a micro-device manufacturing apparatus, said pod including:

• walls configured to contain a substrate and having an opening, said walls including a flange portion configured to contact the flange portion of the chamber;
• and
• a lid configured to openably close the opening, the substrate is being transferred between said pod and the chamber through the opening, the improvement comprising:
• an electromagnetic shield member, said electromagnetic shield member being arranged over said walls and on the flange portion of said walls, said electromagnetic shield member on the flange portion of said walls being configured to contact the grounded flange portion of the chamber while said pod is attached to the outside surface.

An improved micro-device manufacturing apparatus including:

• a grounded electromagnetic-shielded chamber having a door and a flange portion around said door on an outside surface of said chamber;
• a transfer unit, arranged in said chamber and configured to transfer a substrate between said chamber and a pod, the pod being attached to the outside surface and having an electromagnetic shield member which includes a flange portion configured to contact said flange portion of said chamber;
• and
• a processing unit, arranged in said chamber, and configured to process the substrate transferred into said chamber from the pod by said transfer unit, improved in that:
• said flange portion of said chamber is grounded and configured to contact the flange portion of the electromagnetic shield member of the pod while the pod is attached to the outside surface.