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US 2007/0175792 A1Published application
Magnetic seal for wafer containers
OwnerBarry Gregersoninventor
Life of this patent
Estimating the term…
Abstract
A wafer container with the door frame has a magnetic seal that encircles the periphery of the door and has a flexible portion extending laterally outwardly to engage a corresponding magnetic seal around the periphery of the door. Thus the door and container can be provided with a seal that is strong enough to exclude contaminants and also allows easy removal of the door either manually or by a robotic arm.
Claims20
A substrate container, the container comprising:
- an enclosure portion having an open side with a first periphery, a door frame therearound, said door frame having a first sealing part extending therearound;
- substrate supports within the enclosure portion;
- and
- a door having a second periphery sized for engagement with said door frame, said door having a second sealing part extending around the second periphery for sealingly engaging the first sealing part, the door comprising a latch mechanism for latching onto the door frame;
- one of the first sealing part and second sealing part comprising a magnet, the other of the first sealing part and second sealing part comprising a magnetically attractable material whereby force pulls together in a sealing engagement said first sealing part and said second sealing part.
2 more elements
A sealable container for containing wafers, the container comprising:
- an enclosure with a door frame defining an open side, wherein said door frame includes;
- a rectangular outwardly facing flat and radially extending sealing surface and a first elastomeric magnetic seal extending around said door frame;
- and
- a door comprising:
- an interior facing surface;
- a parallel exterior facing surface;
- four side surfaces proximate the interior facing side and the exterior facing side;
- a groove inset in the four sides and extending around said door;
- and
- a second elastomeric magnetic seal in the groove and extending around the door, the second magnetic seal, in cross section, having an inset portion positioned in the groove and an exposed portion extending outwardly therefrom, the exposed portion having a cross section with a base portion, a flexible portion, and a sealing surface in substantial alignment in a radial direction, the sealing surface protruding substantially axially toward the enclosure portion and the exposed door frame as the door is inserted into and removed from the door frame by moving axially in a direction transverse to the greater dimension of the second elastomeric seal.
7 more elements
A method for sealing wafer containers, the method comprising the following steps:
- providing an enclosure defining a first periphery, said enclosure having a door frame around the first periphery, said door frame having a first magnetic gasket and a first door latch mechanism proximate the first periphery;
- and
- providing a door defining a second periphery sized for engagement with said door frame, said door having a second magnetic gasket around the second periphery for sealingly engaging the first magnetic gasket and further having a second door latch mechanism proximate the second periphery for engaging the first latch mechanism;
- and
- engaging the first latch mechanism with the second latch mechanism;
- and
- sealingly engaging the first magnetic gasket with the second magnetic gasket.
4 more elements
Dependencies are inferred from the claim text.