Multiple precursor dispensing apparatus

A method of dispensing multiple precursors to a manufacturing tool comprising:

• providing a fluidic manifold and a plurality of tanks, each tank containing a different precursor, wherein said fluidic manifold further includes a plurality of interconnected sub-manifolds with each of said sub-manifolds connected to one of said tanks;
• detecting a low precursor level in a fluidic processor of the manufacturing tool;
• and
• dispensing a precursor from one of said tanks independently of any other of said tanks.

A system for dispensing multiple precursors to a manufacturing tool comprising:

• a multiple precursor dispenser having a fluidic manifold and a plurality of tanks, each tank containing a different precursor and connected to a different sub-manifold of said fluidic manifold, said sub-manifolds being interconnected;
• a manufacturing tool fluidic processor having a plurality of canisters, each canister containing a different precursor;
• wherein a first dispenser tank communicates with a first tool canister having the same precursor;
• and
• wherein a second dispenser tank communicates with a second tool canister having the same precursor.

A method of dispensing multiple precursors to a manufacturing tool comprising:

• providing a manufacturing tool having a fluidic processor with multiple precursor canisters;
• providing a multiple precursor dispenser connected to said tool, said dispenser having a fluidic manifold with interconnected sub-manifolds and a plurality of tanks;
• detecting a low precursor level in the manufacturing tool;
• dispensing a first precursor from said dispenser to said tool;
• and
• further dispensing a second precursor from said dispenser to said tool.