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AssigneeInternational Business Machines Corporation
InventorsRichard Burda, Alfred Degbotse, Brian Denton, Kenneth Fordyce, Sanjay Hegde, Robert Milne, Sameer Shikalgar, Guogang Zuo
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A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.
A method of inspecting auxiliary equipment in a manufacturing process, said method comprising:
A method of inspecting auxiliary equipment in a manufacturing process, said method comprising:
A method of inspecting auxiliary equipment in a manufacturing process, said method comprising:
Dependencies are inferred from the claim text.