Spin transistor and manufacturing method thereof
AssigneeIndustrial Technology Research Institute
InventorsYing-Wen Huang, Chi-Kuen Lo, Lan-Chin Hsieh, Der-Ray Huang, Yeong-Der Yao, Jau-Jiu Ju
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AssigneeIndustrial Technology Research Institute
InventorsYing-Wen Huang, Chi-Kuen Lo, Lan-Chin Hsieh, Der-Ray Huang, Yeong-Der Yao, Jau-Jiu Ju
Estimating the term…
A spin transistor and a manufacturing method thereof are provided. The method includes defining a required area on a substrate by lithography; forming a doping area by ion-implantation, and forming a magnetoresistive film on the substrate. Finally, the method produces a spin transistor with the emitter, the base, and the collector in the same plane surface. The manufacturing method integrates the emitter, the base, and the collector into one plane, so that miniaturization of the spin transistor is achieved, and it is advantageous for the integration and subsequent packaging of the spin transistor and integrated circuit elements.
A method of manufacturing a spin transistor, comprising:
A method of manufacturing a spin transistor, comprising:
A method of manufacturing a spin transistor, comprising:
A method of manufacturing a spin transistor, comprising:
A spin transistor, comprising:
A spin transistor, comprising:
A spin transistor, comprising:
A spin transistor, comprising:
Dependencies are inferred from the claim text.