Semiconductor wafer
AssigneeDisco Corporation
InventorKazuma Sekiya
Life of this patent
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Abstract
A semiconductor wafer which is disk-shaped as a whole, and which has a substantially flat face, a back substantially flat in at least a main portion thereof and substantially parallel to the face, and a side surface. The side surface is convex as a whole in a longitudinal sectional view. A means to be detected, which is composed of a local flat surface, is disposed in the side surface.
Claims4
A semiconductor wafer which is disk-shaped as a whole, and which has a substantially flat face, a back substantially flat in at least a main portion thereof and substantially parallel to the face, and a side surface, the side surface being convex as a whole in a longitudinal sectional view, wherein
- a means to be detected, which is composed of a local flat surface, is disposed in the side surface.
Dependencies are inferred from the claim text.