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US 2007/0166133 A1Published application
Decoupled chamber body
AssigneeApplied Materials, Inc.
InventorsJae-Chull Lee, Shinichi Kurita, John M. White, Suhail Anwar
Life of this patent
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Abstract
Embodiments of the invention include a chamber body having at least one of a top or bottom decoupled from the sidewalls of the chamber body. The invention is suitable for use as a load lock chamber, substrate transfer chamber and vacuum processing chambers, among others.
Claims34
A load lock chamber comprising:
- a tubular first body having at least two substrate access ports formed therein;
- a first plate sealingly disposed on an upper end surface of the first body;
- a bottom plate sealingly disposed on a lower end surface of the first body, herein the plates and body enclose a substrate transfer chamber;
- and
- a plurality of fasteners clamping the first body between the first and bottom plates.
2 more elements
A load lock chamber comprising:
- a first chamber body having four walls, an open top and an open bottom;
- a bottom plate disposed below the first chamber body, the bottom plate and the first chamber body disposed in a spaced apart relation;
- a first seal circumscribing the open bottom and sealingly engaged with the bottom plate and the first chamber body;
- a first plate disposed above the first chamber body, the first plate and the first chamber body disposed in a sealed spaced apart relation;
- a second chamber body disposed above the first plate;
- a second seal sealingly engaged with the first plate and the second chamber body;
- a second plate disposed above the first chamber body, the second plate and the second chamber body disposed in a spaced apart relation;
- and
- a third seal sealingly engaged with the second plate and the second chamber body.
6 more elements
A vacuum chamber comprising:
- a tubular chamber body having at least one substrate access port formed therethrough;
- a first plate coupled to the chamber body in a spaced apart relation;
- a first seal sealingly engaged with the first plate and chamber body;
- a second plate sealingly coupled to the chamber body, wherein the chamber body and plates bound an interior volume sufficient to accommodate a large area substrate;
- and
- a substrate support disposed in the interior volume.
3 more elements
A method for transferring a substrate to a vacuum chamber, comprising:
- opening a passage formed in sidewall of a tubular chamber body, the tubular chamber body having open ends sealed by a bottom plate and a top plate;
- transferring a substrate through the passage the tubular chamber body;
- and
- sealing the passage.
1 more element
Dependencies are inferred from the claim text.