Housing structure for mounting optical elements
AssigneesCarl Zeiss SMT GmbH, ASML Netherlands B.V.
InventorsYim-Bun Kwan, Bernhard Geuppert, Nico Kemper
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Abstract
In a housing structure for mounting optical elements, in particular of a projection lens housing in a projection exposure system for manufacturing semiconductor elements, attachment locations, which have connecting parts, for connection to a supporting structure are provided on structural elements. Supporting elements, which are provided with mounting flanges for connection to the supporting structure, act on the structural elements in such a way that weight forces are taken up essentially by pressure forces and shear forces.
Claims18
Housing structure for mounting optical elements, in particular of a projection lens housing in a projection exposure system for manufacturing semiconductor elements, wherein attachment locations, with connecting parts, for connection to a supporting structure being provided on structural elements, wherein the connecting parts comprise supporting elements with mounting flanges for connection to the supporting structure, and wherein the supporting elements are connected to the structural elements in such a way that supporting forces, in particular weight forces, are taken up essentially by pressure forces and shear forces.
Dependencies are inferred from the claim text.